Based on your volume and purity needs, we have a wide selection of on-site gas generators supporting the full range of process requirements within the global electronics industry.
You can rely on Linde's experts to deliver low-cost, reliable solutions for:
Gas | Output Range | Purity |
Nitrogen | 6,000 - 50,000 Nm3 per hour | <1 ppb |
Fluorine | 80 - 3,200 liters per hour | 99.9% |
Ammonia | 1,000 - 5,000 liters per minute | 99.99999% |
Low Running Costs
Our on-site gas generators are optimized to keep your total cost of ownership as low as possible. Here we consider all cost factors, including capital expenditures, power consumption, and operating costs.
Reliability
In addition, our on-site gas generators offer you the advantage of uninterrupted operations and continuous delivery of products